We here present the potentialities of the electro-optic technique dedicated to the electric field characterization of plasmas. A fully dielectric and millimetre sized probe allows to measure each component of the electric field vector in real time from quasi DC up to several GHz.
International audience
International audience
The aim of this work is to test the wettability enhancement of a low-wetting and low-cost commercial polymer separator by cold microplasma treatments. Liquid and gas ammonia are tested as precursors in a pulsed microreactor at low pressure. Two modes of plasma producing are used, i.e., with and without bias. Optical emission spectroscopy, contact a...
Many investigations are dedicated to the detection and quantification of reactive oxygen and nitrogen species (RONS), particularly when generated in liquids exposed to cold atmospheric plasmas (CAPs). CAPs are partially ionized gases that can be obtained by applying a high electric field to a gas. A challenge is to get better insights on the plasma...
International audience
In this paper, the impact of the plasma process for III-V/Ge heterostructure etching on both the morphology and the photovoltaic performance is investigated for the fabrication of multijunction solar cells with a through cell via contact architecture. Three different plasma chemistries (BCl3/Cl2 , SiCl4/Cl2 , and SiCl4/H2/Cl2) have been studied in ...
International audience
International audience
International audience
