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Very Large Scale Integration Optomechanics: a cure for loneliness of NEMS resonators?

Authors
  • Hermouet, Maxime
  • Sansa, Marc
  • Defoort, Martial
  • Banniard, Louise
  • Dominguez-Medina, Sergio
  • Fostner, Shawn
  • Palanchoke, Ujwol
  • Fafin, Alexandre
  • Gely, Marc
  • Hutin, Louis
  • Plantier, Christophe
  • Rolland, Emmanuel
  • Tabone, Claude
  • Usai, Giulia
  • Ernst, Thomas
  • Villard, Patrick
  • Billiot, Gerard
  • Mattei, Paul
  • Nonglaton, Guillaume
  • Fontelaye, Caroline
  • And 12 more
Publication Date
Dec 01, 2018
Source
HAL-INRIA
Keywords
Language
English
License
Unknown
External links

Abstract

The first Very Large Scale Integration process with variable shape beam lithography for optomechanical devices is presented. State of the art performance was obtained with silicon microdisk resonators showing 1 million optical quality factors and 10$^{-17}$ m.Hz$^{(-1/2)}$ displacement resolution. Single-particle mass spectrometry could be performed with these optomechanical resonators in vacuum. The devices retained high performance when directly immersed in liquid media, allowing for biosensing experiments. These results open the door to large, dense arrays of optomechanical sensors.

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