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Ultra compact 45 GHz CMOS compatible Germanium waveguide photodiode with low dark current.

Authors
Type
Published Article
Journal
Optics Express
1094-4087
Publisher
The Optical Society
Publication Date
Volume
19
Issue
25
Pages
24897–24904
Identifiers
DOI: 10.1364/OE.19.024897
PMID: 22273883
Source
Medline
License
Unknown

Abstract

We present a compact 1.3 × 4 μm2 Germanium waveguide photodiode, integrated in a CMOS compatible silicon photonics process flow. This photodiode has a best-in-class 3 dB cutoff frequency of 45 GHz, responsivity of 0.8 A/W and dark current of 3 nA. The low intrinsic capacitance of this device may enable the elimination of transimpedance amplifiers in future optical data communication receivers, creating ultra low power consumption optical communications.

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