Micro and nano structures are an increasing challenge in terms of tolerance verification and process quality control: smaller dimensions led to a smaller tolerance zone to be evaluated. This paper focuses on the verification of CD, DVD and HD-DVD nanoscale features. CD tolerance features are defines in relation to the optical disc functionality. SEM image processing is used to control the sub-micrometre features and detect the replication accuracy. Nickel stampers and polycarbonate moulded optical discs are measures to verify the dimensional tolerances from a metrological point of view. The replication quality is assessed and the measurements uncertainty is calculated following the substitution method.