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Thermal-Performance Instability in Piezoresistive Sensors: Inducement and Improvement.

Authors
  • Liu, Yan1, 2
  • Wang, Hai3
  • Zhao, Wei4
  • Qin, Hongbo5
  • Fang, Xuan6
  • 1 School of Electro-Mechanical Engineering, Xidian University, Xi'an 710071, China. [email protected]
  • 2 State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710054, China. [email protected]
  • 3 School of Electro-Mechanical Engineering, Xidian University, Xi'an 710071, China. [email protected]
  • 4 School of Electro-Mechanical Engineering, Xidian University, Xi'an 710071, China. [email protected]
  • 5 School of Electro-Mechanical Engineering, Xidian University, Xi'an 710071, China. [email protected]
  • 6 School of Electro-Mechanical Engineering, Xidian University, Xi'an 710071, China. [email protected]
Type
Published Article
Journal
Sensors
Publisher
MDPI AG
Publication Date
Nov 24, 2016
Volume
16
Issue
12
Identifiers
PMID: 27886125
Source
Medline
Keywords
License
Unknown

Abstract

The field of piezoresistive sensors has been undergoing a significant revolution in terms of design methodology, material technology and micromachining process. However, the temperature dependence of sensor characteristics remains a hurdle to cross. This review focuses on the issues in thermal-performance instability of piezoresistive sensors. Based on the operation fundamental, inducements to the instability are investigated in detail and correspondingly available ameliorative methods are presented. Pros and cons of each improvement approach are also summarized. Though several schemes have been proposed and put into reality with favorable achievements, the schemes featuring simple implementation and excellent compatibility with existing techniques are still emergently demanded to construct a piezoresistive sensor with excellent comprehensive performance.

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