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Theoretical investigation of surface acoustic wave in the new, three-layered structure: ZnO/AlN/diamond.

Authors
  • El Hakiki, Mohamed
  • Elmazria, Omar
  • Alnot, Patrick
Type
Published Article
Journal
IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control
Publisher
Institute of Electrical and Electronics Engineers
Publication Date
Mar 01, 2007
Volume
54
Issue
3
Pages
676–681
Identifiers
PMID: 17375837
Source
Medline
License
Unknown

Abstract

The new layered structure, ZnO/AlN/diamond, for surface acoustic wave (SAW) devices is investigated for gigahertz-band applications. This structure combines the advantages of both piezoelectric materials, with a high electromechanical coupling coefficient (K2) of ZnO and high acoustic velocity of AlN. Theoretical results show that Rayleigh mode SAWs with large phase velocities up to 12,200 m/s and large K2 from 1 to 3% were generated with this new structure.

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