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A system for supplying constant electrical power for postprocessing tin-doped indium oxide films.

Authors
Type
Published Article
Journal
The Review of scientific instruments
Publication Date
Volume
79
Issue
7
Pages
76105–76105
Identifiers
DOI: 10.1063/1.2956976
PMID: 18681742
Source
Medline
License
Unknown

Abstract

Annealing tin doped indium oxide (ITO) thin films by self-heating shows potential for reducing the crystallization temperature required to optimize the optical and electrical properties of the films. It also shows promise as a cost effective method of studying the heat treatment process in situ. A computer based solution was developed to allow for a precise control over the annealing process. To anneal at a fixed temperature, a feedback loop senses changes in the resistance of the sample and adjusts the current across the load accordingly to ensure constant delivery of power to an ITO film.

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