Synthesis of titanium dioxide thin films obtained by hot target magnetron sputtering

Authors

• Graillot-Vuillecot, Robin
• Thomann, Anne Lise
• Millon, Eric
• Cachoncinlle, Christophe
• caillard, amael

Publication Date

May 01, 2019

Source

Kaleidoscope Open Archive

Keywords

• [Spi.Plasma]Engineering Sciences [Physics]/Plasmas
• [Spi.Mat]Engineering Sciences [Physics]/Materials

Language

English

License

Unknown

External links

• Full record on hal.archives-ouvertes.fr