Surface roughness scattering in two dimensional electron gas channel Authors liu, b yw, lu jin, gr zhao, y wang, xl zhu, qs wang, zg Publication Date Jan 01, 2010 Source Knowledge Repository of SEMI,CAS Keywords Molecular-Beam Epitaxy Mobility Algan/Gan Heterostructures Ray Photoemission Spectroscopy Performance Aln Modfets Inn 半导体材料 Atomic Layer Deposition Performance Modfets Atomic Layer Epitaxial Growth Ale Mle Growth Molecular Layer Epitaxial Growth Chemical Beam Epitaxial Growth Cbe Gas Source Mbe Gsmbe Metalorganic Molecular Beam Epitaxy Mombe Ommbe Chemical Vapour Deposition Apcvd Chemical Vapor Deposition Cvd Laser Cvd Laser-Induced Cvd Lpcvd Chemical Vapour Infiltration Chemical Vapor Infiltration Cvi Crystal Growth From Vapour Laser Deposition Mocvd Metalorganic Chemical Vapour Deposition Movpe Omcvd Omvpe Molecular Beam Epitaxial Growth Mbe Migration-Enhanced Epitaxy Vapour Phase Epitaxial Growth Hot Wall Epitaxial Growth Vapor Phase Epitaxial Growth Vpe Cvi (Fabrication) Ald Molecular Beam Epitaxy Coulomb-Bethe Many-Body Expansion Competence Incompetence, Mental Mental Competence Modulation Doped Fets License Unknown External links Full record on ir.semi.ac.cn