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Sub-micron lines patterning into silica using water developable chitosan bioresist films for eco-friendly positive tone e-beam and UV lithography

Authors
  • Leclercq, Jean-Louis
  • Soppera, Olivier
  • CAILLAU, Mathieu
  • Chevalier, Céline
  • Cremillieu, Pierre
  • Delair, Thierry
  • Laurenceau, Emmanuel
  • Chevolot, Yann
  • Leuschel, Benjamin
  • Ray, Cédric
  • Moulin, Christophe
  • Jonin, Christian
  • Benichou, Emmanuel
  • Brevet, Pierre-Francois
  • Yeromonahos, Christelle
  • Kye, Jongwook
  • Owa, Soichi
Publication Date
Feb 25, 2018
Source
HAL-INRIA
Keywords
Language
English
License
Unknown
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