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Study on the resin layer formation according to the imprinting pressure rates.

Authors
  • Jang, Siyoul
Type
Published Article
Journal
Journal of Nanoscience and Nanotechnology
Publisher
American Scientific Publishers
Publication Date
Feb 01, 2012
Volume
12
Issue
2
Pages
1183–1187
Identifiers
PMID: 22629917
Source
Medline
License
Unknown

Abstract

The UV imprinting period and pressure magnitude are very important processing factors along with pattern shape and density of mold pattern. In the control process of the residual resin layer, the imprinting period and the magnitude and rate of the imprinting pressure should be properly assigned according to the density and shape of the mold pattern as well as resin viscosity etc. In this work, the imprinting time and pressure rate are studied for the formation and thickness variation of the residual resin layer. The thickness variation of the resin layer during imprinting process is computed according to the variation of the imprinting load rate, and some comparison results are successfully obtained with a 3-D shape of the mold patterns.

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