A study of indium incorporation in In-rich InGaN grown by MOVPE
- Authors
-
- guo, y
- liu, xl
- song, hp
- yang, al
- xq, xu
- zheng, gl
- wei, hy
- yang, sy
- zhu, qs
- wang, zg
- Publication Date
- Jan 01, 2010
- Source
- Knowledge Repository of SEMI,CAS
- Keywords
-
- Movpe
- In-Rich Ingan
- Indium Incorporation
- Molecular-Beam Epitaxy
- Chemical-Vapor-Deposition
- Critical Thickness
- Droplet Formation
- Phase-Separation
- Temperature
- Films
- Heterostructures
- Immiscibility
- Inxga1-Xn
- 半导体材料
- Atomic Layer Deposition
- Atomic Layer Deposition
- Chemical Vapor Deposition
- Atomic Layer Deposition
- Vapor-Plating
- Phase Separation
- Temperature
- Photography--Films
- Finite Volume Method
- Heterostructures
- Solubility
- Atomic Layer Epitaxial Growth
- Ale
- Mle Growth
- Molecular Layer Epitaxial Growth
- Chemical Beam Epitaxial Growth
- Cbe
- Gas Source Mbe
- Gsmbe
- Metalorganic Molecular Beam Epitaxy
- Mombe
- Ommbe
- Chemical Vapour Deposition
- Apcvd
- Chemical Vapor Deposition
- Cvd
- Laser Cvd
- Laser-Induced Cvd
- Lpcvd
- Chemical Vapour Infiltration
- Chemical Vapor Infiltration
- Cvi
- Crystal Growth From Vapour
- Laser Deposition
- Mocvd
- Metalorganic Chemical Vapour Deposition
- Movpe
- Omcvd
- Omvpe
- Molecular Beam Epitaxial Growth
- Mbe
- Migration-Enhanced Epitaxy
- Vapour Phase Epitaxial Growth
- Hot Wall Epitaxial Growth
- Vapor Phase Epitaxial Growth
- Vpe
- Cvi (Fabrication)
- Ald
- Molecular Beam Epitaxy
- Coulomb-Bethe
- Many-Body Expansion
- Atomic Layer Epitaxial Growth
- Ale
- Mle Growth
- Molecular Layer Epitaxial Growth
- Chemical Beam Epitaxial Growth
- Cbe
- Gas Source Mbe
- Gsmbe
- Metalorganic Molecular Beam Epitaxy
- Mombe
- Ommbe
- Chemical Vapour Deposition
- Apcvd
- Chemical Vapor Deposition
- Cvd
- Laser Cvd
- Laser-Induced Cvd
- Lpcvd
- Chemical Vapour Infiltration
- Chemical Vapor Infiltration
- Cvi
- Crystal Growth From Vapour
- Laser Deposition
- Mocvd
- Metalorganic Chemical Vapour Deposition
- Movpe
- Omcvd
- Omvpe
- Molecular Beam Epitaxial Growth
- Mbe
- Migration-Enhanced Epitaxy
- Vapour Phase Epitaxial Growth
- Hot Wall Epitaxial Growth
- Vapor Phase Epitaxial Growth
- Vpe
- Cvi (Fabrication)
- Ald
- Molecular Beam Epitaxy
- Coulomb-Bethe
- Many-Body Expansion
- Cvd (Chemical Vapor Deposition)
- Deposition, Chemical Vapor
- Vapor Deposition, Chemical
- Chemische Beschichtung Aus Dampfphase
- Revetement Chimique En Phase Vapeur
- Atomic Layer Epitaxial Growth
- Ale
- Mle Growth
- Molecular Layer Epitaxial Growth
- Chemical Beam Epitaxial Growth
- Cbe
- Gas Source Mbe
- Gsmbe
- Metalorganic Molecular Beam Epitaxy
- Mombe
- Ommbe
- Chemical Vapour Deposition
- Apcvd
- Cvd
- Laser Cvd
- Laser-Induced Cvd
- Lpcvd
- Chemical Vapour Infiltration
- Chemical Vapor Infiltration
- Cvi
- Crystal Growth From Vapour
- Laser Deposition
- Mocvd
- Metalorganic Chemical Vapour Deposition
- Movpe
- Omcvd
- Omvpe
- Molecular Beam Epitaxial Growth
- Mbe
- Migration-Enhanced Epitaxy
- Vapour Phase Epitaxial Growth
- Hot Wall Epitaxial Growth
- Vapor Phase Epitaxial Growth
- Vpe
- Cvi (Fabrication)
- Ald
- Molecular Beam Epitaxy
- Coulomb-Bethe
- Many-Body Expansion
- 真空镀膜
- Coating, Vacuum
- Deposition, Vapor
- Vacuum Coating
- Vacuum Metallizing
- Vapor Deposition
- Vapor-Phase Deposition
- Bedamfung
- Deposition De La Phase Vapeur
- Cvd (Deposition)
- 相分离
- 温度
- Curing Temperature
- Temperatur
- Temperature (Francais)
- Body Temperature (Non-Biological)
- Atmospheric Temperature
- Temperature Control
- Water Temperature
- Temperatures
- Absolute Temperature
- Ambient Temperature
- Photographic Film
- Films
- Motion Pictures
- Movies
- Cinema
- Feature Films--History And Criticism
- Moving-Pictures
- Microfilms
- Filmstrips
- Film Slides
- Film Strips
- Slidefilms
- Anodised Layers
- Anodized Layers
- Claddings
- Cvd Coatings
- Chemical Vapor Deposited Coatings
- Chemical Vapour Deposited Coatings
- Cvd Thin Films
- Decorative Coatings
- Electrophoretic Coatings
- Fission Reactor Fuel Claddings
- Foils
- Mocvd Coatings
- Optical Fibre Cladding
- Optical Fiber Cladding
- Protective Coatings, Optical Fibre
- Plasma Arc Sprayed Coatings
- Plasma Sprayed Coatings
- Plasma Cvd Coatings
- Plasma Chemical Vapour Deposited Coatings
- Plasma Deposited Coatings
- Polymer Films
- Polymer Coatings
- Vacuum Deposited Coatings
- Vacuum Deposited Thin Films
- Vapour Deposited Coatings
- Vapor Deposited Coatings
- Vapor Deposited Thin Films
- Vapour Deposited Thin Films
- Elektrophoretische Ueberzuege
- Revetements Electrophoretiques
- Plasmalichtbogen-Spruehueberzuege
- Revetements Par Projection Au Plasma
- Motion Pictures (Entertainment)
- 有限体积法
- Art Films
- Cinefilms
- Moving Image Materials
- Solid Solubility
- Immiscibility
- Insolubility
- Miscibility
- Loeslichkeit
- Solubilite
- License
- Unknown
- External links
Abstract
InGaN/GaN heterostructures have been deposited onto (0 0 0 1) sapphire by our home-made low pressure MOVPE with different growth parameters. It has been noted that the indium incorporation depends by a complex way on a number of factors. In this work, the effect of substrate temperature, trimethylindium input flow and V/III ratio on the indium incorporation has been investigated. Finally, by optimizing the growth parameters, we made a series of single-phase InGaN samples with indium content from 10% up to 45%.