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Structural properties of Ge-implanted SiO2 layers and related MOS memory effects

Authors
  • Duguay, S
  • Slaoui, A
  • Grob, JJ
  • Kanoun, M
  • Burignat, Stéphane
  • Souifi, A
Publication Date
Jan 01, 2005
Source
Ghent University Institutional Archive
Keywords
Language
English
License
Unknown
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