Structural ordering and interface morphology in symmetrically strained (GaIn)As/Ga(PAs) superlattices grown on off-oriented GaAs(100)
- Authors
-
- giannini, c
- tapfer, l
- zhuang, y
- de caro, l
- marschner, t
- stolz, w
- ctr, c ss km giannini
- Publication Date
- Jan 01, 1997
- Source
- Knowledge Repository of SEMI,CAS
- Keywords
-
- 半导体物理
- Molecular-Beam Epitaxy
- X-Ray-Diffraction
- Surface-Morphology
- Roughness
- Films
- Heterostructures
- Multilayers
- Ingaas
- Multilayers
- Atomic Layer Deposition
- Finishing
- Roughness
- X-Ray Crystallography
- Photography--Films
- Surface Contamination
- Finite Volume Method
- Heterostructures
- Laser Deposition
- Crystal Growth From Vapour
- Cvi
- Chemical Vapor Infiltration
- Chemical Vapour Infiltration
- Lpcvd
- Laser-Induced Cvd
- Laser Cvd
- Cvd
- Chemical Vapor Deposition
- Apcvd
- Chemical Vapour Deposition
- Ommbe
- Mombe
- Metalorganic Molecular Beam Epitaxy
- Gsmbe
- Gas Source Mbe
- Cbe
- Chemical Beam Epitaxial Growth
- Molecular Layer Epitaxial Growth
- Mle Growth
- Ale
- Atomic Layer Epitaxial Growth
- Plasma Chemical Vapour Deposited Coatings
- Moving Image Materials
- Cinefilms
- Art Films
- 有限体积法
- Motion Pictures (Entertainment)
- Revetements Par Projection Au Plasma
- Plasmalichtbogen-Spruehueberzuege
- Revetements Electrophoretiques
- Elektrophoretische Ueberzuege
- Vapour Deposited Thin Films
- Vapor Deposited Thin Films
- Vapor Deposited Coatings
- Vapour Deposited Coatings
- Vacuum Deposited Thin Films
- Vacuum Deposited Coatings
- Polymer Coatings
- Polymer Films
- Plasma Deposited Coatings
- Plasma Cvd Coatings
- Plasma Sprayed Coatings
- Plasma Arc Sprayed Coatings
- Protective Coatings, Optical Fibre
- Optical Fiber Cladding
- Optical Fibre Cladding
- Mocvd Coatings
- Foils
- Fission Reactor Fuel Claddings
- Electrophoretic Coatings
- Decorative Coatings
- Cvd Thin Films
- Chemical Vapour Deposited Coatings
- Chemical Vapor Deposited Coatings
- Cvd Coatings
- Claddings
- Anodized Layers
- Anodised Layers
- Slidefilms
- Film Strips
- Film Slides
- Filmstrips
- Microfilms
- Moving-Pictures
- Feature Films--History And Criticism
- Cinema
- Movies
- Motion Pictures
- Films
- Photographic Film
- Superfinish
- Superfinishing
- Hot Finishing
- Fattening
- Smoothness
- Fini Superficiel
- Surface Finish
- Surface Finishing (Process)
- Oberflaechenbehandlung
- Finition
- Surface Treatment
- Finishing Materials
- Finishes And Finishing
- Surface Roughness
- 粗糙度
- Surface Reconstruction
- Surface Morphology
- X Ray Diffraction
- X射线衍射
- 表面重构
- X Ray Diffractometers
- ｘ射线晶体学
- Xray Diffraction
- X Ray Crystallography
- Roentgenbeugung
- Roentenbeugung
- Diffraction Des Rayons X
- Xrd
- Weissenberg Cameras
- Radiocrystallography
- Pendellosung Fringes
- Patterson Diagrams
- Laue Effect
- Debye-Scherrer Cameras
- Borrmann Effect
- X-Ray Diffraction
- Many-Body Expansion
- Coulomb-Bethe
- Molecular Beam Epitaxy
- Ald
- Cvi (Fabrication)
- Vpe
- Vapor Phase Epitaxial Growth
- Hot Wall Epitaxial Growth
- Vapour Phase Epitaxial Growth
- Migration-Enhanced Epitaxy
- Mbe
- Molecular Beam Epitaxial Growth
- Omvpe
- Omcvd
- Movpe
- Metalorganic Chemical Vapour Deposition
- Mocvd
- License
- Unknown
- External links
Abstract
In this work we investigate the structural properties of symmetrically strained (GaIn)As/GaAs/Ga(PAs)/GaAs superlattices by means of x-ray diffraction, reciprocal-space mapping, and x-ray reflectivity. The multilayers were grown by metalorganic vapor-phase epitaxy on (001) GaAs substrates intentionally off-oriented towards one of the nearest [110] directions. High-resolution triple-crystal reciprocal-space maps recorded for different azimuth angles in the vicinity of the (004) Bragg diffraction clearly show a double periodicity of the x-ray peak intensity that can be ascribed to a lateral and a vertical periodicity occurring parallel and perpendicular to the growth surface. Moreover, from the intensity modulation of the satellite peaks, a lateral-strain gradient within the epilayer unit cell is found, varying from a tensile to a compressive strain. Thus, the substrate off-orientation promotes a lateral modulation of the layer thickness (ordered interface roughness) and of the lattice strain, giving rise to laterally ordered macrosteps. In this respect, contour maps of the specular reflected beam in the vicinity of the (000) reciprocal lattice point were recorded in order to inspect the vertical and lateral interface roughness correlation, A semiquantitative analysis of our results shows that the interface morphology and roughness is greatly influenced by the off-orientation angle and the lateral strain distribution. Two mean spatial wavelengths can be determined, one corresponding exactly to the macrostep periodicity and the other indicating a further interface waviness along the macrosteps. The same spatial periodicities were found on the surface by atomic-force-microscopy images confirming the x-ray results and revealing a strong vertical correlation of the interfaces up to the outer surface.
