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Solid-state Nanopore Array Membranes Patterned by Electron Beam Lithography, Nanosphere Lithography and Aluminum Anodization

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Infoscience @ EPFL
Keywords
  • Solid-State Nanopore Array Membranes
  • Electron Beam Lithography (Ebl)
  • Nanosphere Lithography (Nsl)
  • Aluminum Anodization
  • Microfabrication
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Abstract

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