Affordable Access

A simple route of morphology control and structural and optical properties of ZnO grown by metal-organic chemical vapour deposition

  • Fan, HB
  • Yang, SY
  • Zhang, PF
  • Wei, HY
  • Liu, XL
  • Jiao, CM
  • Zhu, QS
  • Chen, YH
  • Wang, ZG
Publication Date
Jan 01, 2008
Knowledge Repository of SEMI,CAS
External links


Employing the metal-organic chemical vapour deposition (MOCVD) technique, we prepare ZnO samples with different morphologies from the film to nanorods through conveniently changing the bubbled diethylzinc flux (BDF) and the carrier gas flux of oxygen (OCGF). The scanning electron microscope images indicate that small BDF and OCGF induce two-dimensional growth while the large ones avail quasi-one-dimensional growth. X-ray diffraction (XRD) and Raman scattering analyses show that all of the morphology-dependent ZnO samples are of high crystal quality with a c-axis orientation. From the precise shifts of the 2 theta. locations of ZnO (002) face in the XRD patterns and the E-2(high) locations in the Raman spectra, we deduce that the compressive stress forms in the ZnO samples and is strengthened with the increasing BDF and OCGF. Photoluminescence spectroscopy results show all the samples have a sharp ultraviolet luminescent band without any defects-related emission. Upon the experiments a possible growth mechanism is proposed.

Report this publication


Seen <100 times