Self-Pulsing and instabilities in silicon-based Micro Hollow Cathode Discharge operating in DC excitation

Non-thermal plasma generators exhibit discharge stability over a significant region and can operate at atmospheric pressure. Among the typical configurations of microplasma reactors, Micro Hallow Cathode Discharge (MHCD) are made of two electrodes separated by a thin dielectric layer [1]. Advanced techniques provide greater control over reactor shape, thereby expanding the potential applications of microplasma sources [2]. New geometries allow for the generation of plasma with unique properties, but are also limited by the inherent characteristics of its material [3]. In this study, we focus on the different electrical regimes achievable and the instabilities created as well in closed cavity shaped reactors and reactors with a ThroughSilicon Via (TSV). Among them is the self-pulsing regime, in which the current and plasma voltage do not reach a steady-state. These oscillations are not a resonance and are mainly influenced by the capacitance of the reactor and the energy delivered by the power supply [4]. We investigate here the pattern behavior of two different geometries of plasma reactor operating in direct current at atmospheric pressure in He as shown Fig 1. These results are obtained using tools allowing for the observation of the voltage oscillation, the current spikes and the extinction phenomena.[1] K. H. Schoenbach, R. Verhappen, and T. Tessnow, Appl. Phys. Lett. 68, 13 (1996)[2] J. G. Eden et al., J. Phys. Appl. Phys. 36, 2869–2877 (2003)[3] R. Michaud et al., Plasma Sources Sci. Technol. 27, 025005 (2018)[4] X. Aubert, G. Bauville, J. Guillon, B. Lacour, V. Puech, and A. Rousseau, Plasma Sources Sci. Technol16,.23–32 (2007)