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Self-calibrating lateral scanning white-light interferometer.

Authors
  • Munteanu, Florin
Type
Published Article
Journal
Applied Optics
Publisher
The Optical Society
Publication Date
Apr 20, 2010
Volume
49
Issue
12
Pages
2371–2375
Identifiers
DOI: 10.1364/AO.49.002371
PMID: 20411018
Source
Medline
License
Unknown

Abstract

Lateral scanning white-light interferometry represents an attractive alternative to the standard white-light interferometry. Its main advantage over the latter procedure consists in the ability to scan large samples continuously, without the need of a cumbersome stitching procedure. Presently, the main drawback in the path of large-scale industrial acceptance of this method is the need for careful calibration of the tilt angle prior to each measurement. A novel self-calibration approach is presented. Using the data acquired during the normal scanning process, the need of an initial tilt angle calibration is eliminated and on-the-fly system adjustments for the best signal-to-noise ratio can be performed without an increase in the measurement time dictated by recalibration.

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