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Self-calibrating lateral scanning white-light interferometer.

Authors
Type
Published Article
Journal
Applied Optics
1539-4522
Publisher
The Optical Society
Publication Date
Volume
49
Issue
12
Pages
2371–2375
Identifiers
DOI: 10.1364/AO.49.002371
PMID: 20411018
Source
Medline

Abstract

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