Affordable Access

Reactive plasma cleaning and restoration of transition metal dichalcogenide monolayers

Authors
  • Marinov, Daniil;
  • de Marneffe, Jean-Francois;
  • Smets, Quentin;
  • Arutchelvan, Goutham;
  • Bal, Kristof M;
  • Voronina, Ekaterina;
  • Rakhimova, Tatyana;
  • Mankelevich, Yuri;
  • El Kazzi, Salim;
  • Nalin Mehta, Ankit;
  • Wyndaele, Pieter-Jan;
  • Heyne, Markus Hartmut;
  • Zhang, Jianran;
  • With, Patrick C;
  • Banerjee, Sreetama;
  • Neyts, Erik C;
  • Asselberghs, Inge;
  • Lin, Dennis;
  • De Gendt, Stefan; 43564;
Publication Date
Jan 28, 2021
Source
Lirias
Keywords
License
Unknown
External links

Abstract

status: published

Report this publication

Statistics

Seen <100 times