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Quantum oscillations and beats in X-ray diffraction during film growth.

Authors
  • Lee, Y-R
  • Gray, A
  • Tischler, J
  • Czoschke, P
  • Hong, H
  • Chang, S-L
  • Chiang, T-C
Type
Published Article
Journal
Physical review letters
Publication Date
Oct 12, 2007
Volume
99
Issue
15
Pages
156103–156103
Identifiers
PMID: 17995191
Source
Medline
License
Unknown

Abstract

X-ray diffraction from a growing film at an anti-Bragg point should exhibit bilayer oscillations caused by interference. In an experiment of TiN film growth by laser ablation onto sapphire, an unexpected beating envelope function is found to modulate the oscillations. The successive nodes and antinodes are identified with the development of new growth domains separated by one atomic layer in thickness. This effect allows atomic layer counting of the film thickness distribution. The results imply that the growth is not characterized by a continuum stochastic process, as usually assumed.

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