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Primary Nucleation-Dominated Chemical Vapor Deposition Growth for Uniform Graphene Monolayers on Dielectric Substrate

  • Wang, Huaping
  • Xue, Xudong
  • Jiang, Qianqing
  • Wang, Yanlei
  • Geng, Dechao
  • Cai, Le
  • Wang, Liping
  • Xu, Zhiping
  • Yu, Gui
Publication Date
Jul 17, 2019
Institutional Repository of Institute of Process Engineering, CAS (IPE-IR)
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Direct chemical vapor deposition growth of high quality graphene on dielectric substrates holds great promise for practical applications in electronics and optoelectronics. However, graphene growth on dielectrics always suffers from the issues of inhomogeneity and/or poor quality. Here, we first reveal that a novel precursor-modification strategy can successfully suppress the secondary nucleation of graphene to evolve ultrauniform graphene monolayer film on dielectric substrates. A mechanistic study indicates that the hydroxylation of silica substrate weakens the binding between graphene edges and substrate, thus realizing the primary nucleation-dominated growth. Field-effect transistors based on the graphene films show exceptional electrical performance with the charge carrier mobility up to 3800 cm(2) V-1 s(-1) in air, which is much higher than those reported results of graphene films grown on dielectrics.

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