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Plasma-enhanced atomic layer deposition of zinc phosphate

Authors
  • Dobbelaere, Thomas
  • Minjauw, Matthias
  • Ahmad, Tareq
  • Vereecken, PM
  • Detavernier, Christophe
Publication Date
Jan 01, 2016
Identifiers
DOI: 10.1016/j.jnoncrysol.2016.04.032
OAI: oai:archive.ugent.be:8083013
Source
Ghent University Institutional Archive
Keywords
Language
English
License
Unknown
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