Plasma-enhanced atomic layer deposition of zinc phosphate

Authors

• Dobbelaere, Thomas
• Minjauw, Matthias
• Ahmad, Tareq
• Vereecken, PM
• Detavernier, Christophe

Publication Date

Jan 01, 2016

Identifiers

DOI: 10.1016/j.jnoncrysol.2016.04.032

OAI: oai:archive.ugent.be:8083013

Source

Ghent University Institutional Archive

Keywords

• Physics And Astronomy
• Zinc Phosphate
• Ozone
• Glass
• Phosphates
• Plasma-Enhanced
• Atomic Layer Deposition
• Oxide
• Thin-Films
• Aluminum Phosphate

Language

English

License

Unknown

External links

• Full record on biblio.ugent.be
  
• Full record on biblio.ugent.be