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Plasma process induced damages on n-MOSFET with plasma oxidized and nitrided gate dielectrics

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포항공과대학교
Keywords
  • Plasma Oxidation
  • Plasma Nitridation
  • Gate Oxide Integrity
  • Plasma Process-Induced Damage
  • Hot Carrier Effect
  • Oxidation
  • Silicon
  • Oxide
  • Sio2
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