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Plasma enhanced atomic layer deposition of a (nitrogen doped) Ti phosphate coating for improved energy storage in Li-ion batteries

Authors
  • Henderick, Lowie;
  • Hamed, Hamid;
  • Mattelaer, Felix;
  • Minjauw, Matthias;
  • Nisula, Mikko;
  • Meersschaut, Johan; 9775;
  • Dendooven, Jolien;
  • Safari, Mohammadhosein;
  • Vereecken, Philippe; 63235;
  • Detavernier, Christophe;
Publication Date
Jun 15, 2021
Source
Lirias
Keywords
License
Unknown
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Abstract

status: published

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