Photoluminescence spectroscopy and positron annihilation spectroscopy probe of alloying and annealing effects in nonpolar m-plane ZnMgO thin films
- Authors
-
- yang, al
- song, hp
- liang, dc
- wei, hy
- liu, xl
- jin, p
- qin, xb
- yang, sy
- zhu, qs
- wang, zg
- Publication Date
- Jan 01, 2010
- Source
- Knowledge Repository of SEMI,CAS
- Keywords
-
- Alloying
- Annealing
- Electrical Conductivity
- Excitons
- Ii-Vi Semiconductors
- Magnesium Compounds
- Mocvd Coatings
- Photoluminescence
- Positron Annihilation
- Semiconductor Thin Films
- Vacancies (Crystal)
- Wide Band Gap Semiconductors
- Zinc Compounds
- Semiconductors
- Emission
- Origin
- Diodes
- 半导体材料
- Alloying
- Rapid Thermal Processing
- Heat Treatment
- Electrical Properties
- Electric Conduction
- Electrochemistry
- Excitons
- Glass
- Amorphous Semiconductors
- Magnesium Compounds
- Photography--Films
- Photoluminescence
- Positron Annihilation
- Semiconductor Epitaxial Layers
- Crystal Impurities
- Wide Gap Semiconductors
- Zinc Compounds
- Semiconductors
- Emission
- Origin
- Diodes
- Elaboration D Alliage
- Legieren
- Rapid Thermal Annealing
- Rapid Thermal Process
- Annealing
- Incoherent Light Annealing
- Arc Lamp Annealing
- Flash Lamp Annealing
- Halogen Lamp Annealing
- Rta
- Rapid Thermal Nitridation
- Rapid Thermal Oxidation
- Rtp
- Recrystallisation Annealing
- Recrystallization Annealing
- Solution Annealing
- Solution Annealing Mechanisms
- Loesungsgluehung
- Mecanismes De Mise En Solution (Recuit)
- Solution Annealing Parameters
- Loesungsgluehbedingungen
- Parametres De Recuit En Solution Solide
- 辐射损伤
- Austempering
- Calcination
- Electron Beam Annealing
- Electron Beam Applications
- Electron Beam Deposition
- Graphitising
- Graphitizing
- Austenitising
- Homogenising
- Sensitisation (Metallurgy)
- Treatment, Heat
- Laser Beam Annealing
- Laser Annealing
- Magnetic Annealing
- Annealing, Magnetic
- Normalising
- Normalizing
- Radiation Effects
- Damage, Radiation
- Irradiation Effects
- Particle Scattering
- Radiation Damage
- Thermal Spikes
- Spheroidizing
- Thermomagnetic Treatment
- Ultraviolet Radiation Effects
- Uv Radiation Effects
- Annealing Mechanisms
- Gluehvorgang
- Heat Treatment Mechanisms
- Mecanismes De Recuit
- Annealing Parameters
- Gluehbedingungen
- Heat Treatment Parameters
- Parametres De Recuit
- Annealing Processes
- Gluehen
- Heat Treatment Processes
- Procede De Recuit
- Calcination (Francais)
- Kalzinierung
- Heat Treating
- Magnetische Gluehung
- Recuit Magnetique
- Normalizing Mechanisms
- Mecanismes De Normalisation
- Mecanismes De Recuits De Normalisation
- Normalisierung
- Normalizing Parameters
- Normalisierungsbedingungen
- Parametres De Normalisation
- Defauts D Irradiation
- Strahlungs Schaeden
- Irradiation
- Heating
- Heating Methods
- Thermal Treatment
- Alpha Annealing
- Alphatizing
- Galvannealing
- Soft Annealing
- Irradiation Damage
- Elektrische Eigenschaften
- Proprietes Electriques
- Electrical Props
- Bardeen Approximation
- Electrical Conductivity
- Superconductivity
- Electric Properties
- 电导率
- Conductivity, Electrical
- Electrolytic Conductivity Of Liquids
- Mattheissen'S Rule
- Minimum Metallic Conductivity
- Conductivity
- Conductivite Electrique
- Conductivity (Electrical)
- Electrical Resistance
- Electrical Resistivity
- Elektrische Leitfaehigkeit
- Elektrischer Widerstand
- Resistivite Electrique
- Resistivity (Electrical)
- Electric Conductivity
- Electric Resistance
- Resistivity, Electrical
- Conductance (Electrical)
- Electrical Conductance
- Specific Conductance
- Electroconductivity
- Resistivity
- Conductivity, Electric
- Ec
- 电化学
- Conductivity (Electrial)
- Debye-Huckel Theory
- Electric Double Layers
- Electrical Double Layers
- Ionic Conductivity
- Conductivity, Ionic
- Conductivite Ionique
- Ionenleitung
- Phonon-Exciton Interactions
- Exciton-Phonon Interactions
- Trions
- 玻璃固化
- Aluminosilicate Glasses
- Glasses
- Silicate Glasses
- Halide Glasses
- Bromide Glasses
- Chloride Glasses
- Iodide Glasses
- Ii-Vi Semiconductors
- 2-6 Semiconductors
- Pseudobinary Semiconductors
- Phosphate Glasses
- Semiconductor Doped Glasses
- Vitrification
- Glass Formation
- Glase
- Verres
- Graater London Audio Specialisation Scheme
- Noncrystalline Semiconductors
- Semiconductor Glasses
- Chalcogenide Glasses
- Degenerate Semiconductors
- Heavily Doped Semiconductors
- Iii-V Semiconductors
- 3-5 Semiconductors
- Iii-Vi Semiconductors
- 3-6 Semiconductors
- Iv-Vi Semiconductors
- 4-6 Semiconductors
- Composes Du Magnesium
- Magnesiumverbindungen
- Photographic Film
- Films
- Motion Pictures
- Movies
- Cinema
- Feature Films--History And Criticism
- Moving-Pictures
- Microfilms
- Filmstrips
- Film Slides
- Film Strips
- Slidefilms
- Anodised Layers
- Anodized Layers
- Claddings
- Cvd Coatings
- Chemical Vapor Deposited Coatings
- Chemical Vapour Deposited Coatings
- Cvd Thin Films
- Decorative Coatings
- Electrophoretic Coatings
- Fission Reactor Fuel Claddings
- Foils
- Mocvd Coatings
- Optical Fibre Cladding
- Optical Fiber Cladding
- Protective Coatings, Optical Fibre
- Plasma Arc Sprayed Coatings
- Plasma Sprayed Coatings
- Plasma Cvd Coatings
- Plasma Chemical Vapour Deposited Coatings
- Plasma Deposited Coatings
- Polymer Films
- Polymer Coatings
- Vacuum Deposited Coatings
- Vacuum Deposited Thin Films
- Vapour Deposited Coatings
- Vapor Deposited Coatings
- Vapor Deposited Thin Films
- Vapour Deposited Thin Films
- Elektrophoretische Ueberzuege
- Revetements Electrophoretiques
- Plasmalichtbogen-Spruehueberzuege
- Revetements Par Projection Au Plasma
- Motion Pictures (Entertainment)
- 光致发光
- Annihilation, Positron
- Electron-Positron Interactions (Atomic Physics)
- Electron-Positron Interactions (Molecular Physics)
- Electron-Positron Annihilation
- Semiconductor Thin Films
- Impurities
- Doping Profiles
- Impurity Distribution
- Impurity Clustering
- Impurity Segregation
- Impurity-Dislocation Interactions
- Dislocation-Impurity Interactions
- Impurity-Vacancy Interactions
- Vacancy-Impurity Interactions
- Schottky Defects
- Vacancies (Crystal)
- Divacancies
- Contaminants
- Impuretes
- Verunreinigungen
- Wide Band Gap Semiconductors
- Wide Bandgap Semiconductors
- Composes Du Zinc
- Zinkverbindungen
- Semiconducting Materials
- Semi-Conductors
- Crystalline Semiconductors
- Semiconductor Devices
- Semiconductor Alloys
- Space-Charge Limited Devices
- Halbleiter
- Semi-Conducteurs
- Emanation
- X Ray Emission
- 原点
- Dioden
- Diodes (Francais)
- P-I-N Diodes
- License
- Unknown
- External links
Abstract
Temperature-dependent photoluminescence characteristics of non-polar m-plane ZnO and ZnMgO alloy films grown by metal organic chemical vapor deposition have been studied. The enhancement in emission intensity caused by localized excitons in m-plane ZnMgO alloy films was directly observed and it can be further improved after annealing in nitrogen. The concentration of Zn vacancies in the films was increased by alloying with Mg, which was detected by positron annihilation spectroscopy. This result is very important to directly explain why undoped Zn1-xMgxO thin films can show p-type conduction by controlling Mg content, as discussed by Li [Appl. Phys. Lett. 91, 232115 (2007)].
