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Performance evaluation of five-DOF motion in ultra-precision linear stage

Authors
  • Lee, Kwang-Il1
  • Lee, Jae-Chang1
  • Yang, Seung-Han1
  • 1 Kyungpook National University, School of Mechanical Engineering, 80, Daehak-ro, Buk-gu, Daegu, 702-701, Republic of Korea , Daegu (South Korea)
Type
Published Article
Journal
International Journal of Precision Engineering and Manufacturing
Publisher
Springer Berlin Heidelberg
Publication Date
Jan 09, 2014
Volume
15
Issue
1
Pages
129–134
Identifiers
DOI: 10.1007/s12541-013-0315-4
Source
Springer Nature
Keywords
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Abstract

In this study, the performance of five-DOF motion in ultra-precision linear stage is evaluated accurately by extending the application of the ISO 230-2 International Standard, which is focused only on the linear displacement motion of a linear stage. The bidirectional accuracy and bidirectional repeatability of positioning in five-DOF motion are calculated by measured geometric errors. Five geometric errors except for the linear displacement error of a linear stage are measured simultaneously using the optimal measurement system, which is designed to enhance the standard uncertainty of the estimated geometric errors. The geometric errors are in good agreement with those from the laser interferometer. In addition, the confidence intervals of the performances are determined by the uncertainties of the equipment used in the experiment.

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