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Optical thickness mapping of InGaAsP/InP layers

Authors
  • Sartorius, B.
  • Brandstattner, M.
  • Wolfram, P.
  • Franke, D.
Publication Date
Jan 01, 1991
Source
Fraunhofer-ePrints
Keywords
Language
English
License
Unknown
External links

Abstract

A two-wavelengths transmission method is presented for measuring the thickness of epitaxial layers with a resolution of better than 10 nm. The measuring speed is high which for the first time makes possible an imagelike presentation of thickness inhomogeneities in layers. A calibration scheme is described which allows quantitative thickness measurements. By the example of measuring buried layers inside a heterostructure the versatile use of the method is demonstrated.

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