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Optical metrology of randomly-distributed Au colloids on a multilayer film.

Authors
Type
Published Article
Journal
Optics Express
1094-4087
Publisher
The Optical Society
Publication Date
Volume
18
Issue
2
Pages
1310–1315
Identifiers
DOI: 10.1364/OE.18.001310
PMID: 20173957
Source
Medline
License
Unknown

Abstract

Spectroscopic ellipsometry (SE) measurements coupled with efficient theoretical modeling and scanning electron microscopy analysis are used in the metrology of randomly-distributed gold nanoparticles on a multilayer film. Measurements were conducted in the ultraviolet to near infrared region at several angles of incidence. To understand the size, shape, and distribution of nanoparticles, a finite-element Green's function approach considering the scattering from multiple nanoparticles was employed to calculate the ellipsometry parameters. Our calculations are in fair agreement with the ellipsometry measurements when suitable size, shape, and distribution pattern of nanoparticles are found. This demonstrates that SE could be a useful tool to the metrology of arbitrarily-distributed nanoparticles on a multilayer film.

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