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Structure Modification, Evolution, and Compositional Changes of Highly Conductive La:BaSnO3 Thin Films Annealed in Vacuum and Air Atmosphere.

Authors
  • Murauskas, Tomas1
  • Kubilius, Virgaudas1
  • Raudonis, Rimantas1
  • Skapas, Martynas2
  • Plausinaitiene, Valentina1
  • 1 Institute of Chemistry, Faculty of Chemistry and Geosciences, Vilnius University, Naugarduko Str. 24, LT-03225 Vilnius, Lithuania. , (Lithuania)
  • 2 Center for Physical Science and Technology, Saulėtekio Av. 3, LT-10259 Vilnius, Lithuania. , (Lithuania)
Type
Published Article
Journal
Nanomaterials
Publisher
MDPI AG
Publication Date
Jul 14, 2022
Volume
12
Issue
14
Identifiers
DOI: 10.3390/nano12142408
PMID: 35889632
Source
Medline
Keywords
Language
English
License
Unknown

Abstract

Perovskite-type La:BaSnO3 (LBSO) has been drawing considerable attention due to its high electron mobility and optical transparency. Its thin film electrical properties, however, remain inferior to those of single crystals. This work investigates the thermal post-treatment process of films deposited using the metalorganic chemical vapor deposition method to improve the electrical properties of different stoichiometry films, and demonstrates the modification of thin film's structural properties using short and excessive annealing durations in vacuum conditions. Using vacuum post-treatment, we demonstrate the improvement of electrical properties in Ba-rich, near-stoichiometric, and Sn-rich samples with a maximum electron mobility of 116 cm2V-1s-1 at r.t. However, the improvement of electrical properties causes surface morphology and internal structural changes, which depend on thin film composition. At temperatures of 900 °C-1400 °C the volatile nature of LBSO constituting elements is described, which reveals possible deterioration mechanisms of thin LBSO air. At higher than 1200 °C, LBSO film's decomposition rate increases exponentially. Thin film structure evolution and previously unreported decomposition is demonstrated by Ba and La diffusion to the substrate, and by evaporation of SnO-SnOx species.

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