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A One-step Approach for Centralized Overactuated Motion Control of a Prototype Reticle Stage

Authors
  • Tacx, Paul (author)
  • Oomen, T.A.E. (author)
Publication Date
Jan 01, 2022
Identifiers
DOI: 10.1016/j.ifacol.2022.11.202
OAI: oai:tudelft.nl:uuid:9186801f-952f-404c-b9de-6a1307c84268
Source
TU Delft Repository
Keywords
Language
English
License
Unknown
External links

Abstract

<p>Next-generation motion stages are envisaged to be lightweight to meet stringent demands regarding accuracy and throughput. The lightweight stage design implies flexible dynamical behavior, which is foreseen to be severely excited due to increasing acceleration forces. The aim of this paper is to exploit additional actuators and sensors to explicitly control the flexible dynamic behavior. A systematic weighting filter design procedure is introduced which is tailored to next-generation motion stages. The presented procedure naturally connects to existing robust control techniques. The procedure is applied to an experimental next-generation reticle stage confirming performance enhancement by exploiting additional actuators and sensors beyond traditional performance limitations.</p> / Team Jan-Willem van Wingerden

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