New turbomolecular pump with central opening for free axial access

Authors

• Mokler, P.H.
• Gesellschaft fuer Schwerionenforschung m...

Publication Date

Jan 01, 2004

Source

OpenGrey Repository

Keywords

• 13K - Pumps, Filters, Pipes, Tubing, Valves, Pressure Vessels
• Turbomolecular Pumps
• Vacuum Systems
• Pipes
• Performance
• Pressure Dependence
• Jets
• Pressure Release
• Design
• Specifications
• Uses
• Construction
• Operation

Language

English

License

Unknown

External links

• Full record on hdl.handle.net