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NANOSCALE DISPENSING OF LIQUIDS WITH AFM-CANTILEVER

Authors
  • Santschi, Ch
  • Meister, A
  • Brugger, J
  • Heinzelmann, H
Publication Date
Jan 01, 2006
Source
Infoscience @ EPFL
License
Unknown
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Abstract

The demand for tools suitable for deposition of small amount of material is continuously increasing. A standard SiN cantilever was modified in order to dispense single droplets of femto- and ato-liter (NAnoscale DISpensing (NADIS)). In order to open a nano fluid channel, holes down to 100 nm were milled in the apex of the cantilever using FIB. The liquid to dispense is loaded on the top-side of the cantilever extremity.

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