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Nano-fabricated solid immersion lenses registered to single emitters in diamond

  • Marseglia, L.
  • Hadden, J. P.
  • Stanley-Clarke, A. C.
  • Harrison, J. P.
  • Patton, B.
  • Ho, Y. -L. D.
  • Naydenov, B.
  • Jelezko, F.
  • Meijer, J.
  • Dolan, P. R.
  • Smith, J. M.
  • Rarity, J. G.
  • O'Brien, J. L.
Published Article
Publication Date
Feb 22, 2011
Submission Date
Dec 06, 2010
DOI: 10.1063/1.3573870
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We describe a technique for fabricating micro- and nano-structures incorporating fluorescent defects in diamond with a positional accuracy in the hundreds of nanometers. Using confocal fluorescence microscopy and focused ion beam (FIB) etching we first locate a suitable defect with respect to registration marks on the diamond surface and then etch a structure using these coordinates. We demonstrate the technique here by etching an 8 micron diameter hemisphere positioned such that a single negatively charged nitrogen-vacancy defect lies at its origin. This type of structure increases the photon collection efficiency by removing refraction and aberration losses at the diamond-air interface. We make a direct comparison of the fluorescence photon count rate before and after fabrication and observe an 8-fold increase due to the presence of the hemisphere.

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