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Multiple Parameter Decoupling for Resonant MEMS Sensors Exploiting Blue Sideband Excitation

Authors
  • Xi, Jingqian;
  • Xu, Lei;
  • Wang, Yuan;
  • Liu, Huafeng;
  • Xiong, Xingyin;
  • Zou, Xudong;
  • Li, Chengxin; 150238;
  • Hu, Fangjing;
  • Wang, Chen; 135470;
  • Kraft, Michael; 117649;
  • Zhao, Chun;
Publication Date
Oct 01, 2023
Source
Lirias
Keywords
License
Unknown
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