Molecular beam epitaxy growth of InGaSb/AlGaAsSb strained quantum well diode lasers
- Authors
-
- Zhang, Yu
- Wang, Guowei
- Tang, Bao
- Xu, Yingqiang
- Xu, Yun
- Song, Guofeng
- Xu, Y.([email protected])
- Publication Date
- Jan 01, 2011
- Source
- Knowledge Repository of SEMI,CAS
- Keywords
-
- Buffer Layers
- Epitaxial Growth
- Gallium Alloys
- Indium Antimonides
- Molecular Beam Epitaxy
- Molecular Beams
- Optical Waveguides
- Optimization
- Semiconducting Gallium Arsenide
- Semiconductor Quantum Wells
- Tellurium
- Tellurium Compounds
- 光电子学
- Buffer Layers
- Epitaxy
- Gallium Alloys
- Indium Antimonides
- Atomic Layer Deposition
- Molecular Beams
- Optical Wave Guides
- Salaries
- Quantum Well Devices
- Tellurium
- Tellurium Compounds
- Epitaxial Growth
- Solid Phase Epitaxial Growth
- Solid Phase Epitaxy
- Spe
- Atomic Layer Epitaxial Growth
- Ale
- Mle Growth
- Molecular Layer Epitaxial Growth
- Chemical Beam Epitaxial Growth
- Cbe
- Gas Source Mbe
- Gsmbe
- Metalorganic Molecular Beam Epitaxy
- Mombe
- Ommbe
- Chemical Vapour Deposition
- Apcvd
- Chemical Vapor Deposition
- Cvd
- Laser Cvd
- Laser-Induced Cvd
- Lpcvd
- Chemical Vapour Infiltration
- Chemical Vapor Infiltration
- Cvi
- Crystal Growth From Vapour
- Laser Deposition
- Mocvd
- Metalorganic Chemical Vapour Deposition
- Movpe
- Omcvd
- Omvpe
- Molecular Beam Epitaxial Growth
- Mbe
- Migration-Enhanced Epitaxy
- Vapour Phase Epitaxial Growth
- Hot Wall Epitaxial Growth
- Vapor Phase Epitaxial Growth
- Vpe
- Cvi (Fabrication)
- Ald
- Molecular Beam Epitaxy
- Coulomb-Bethe
- Many-Body Expansion
- Molecular Rays
- Positive Rays
- Canal Rays
- Goldstein Rays
- Rays, Canal
- Optical Waveguides
- Optical Couplers
- Optical Connectors
- Uhf Couplers
- Ultra-High-Frequency Couplers
- Waveguide Couplers
- Couplers (Waveguide)
- Junctions, Waveguide
- Waveguide Connectors
- Waveguide Joints
- 极大化
- Wages
- Compensation
- Departmental Salaries
- Earnings
- Pay
- Remuneration
- Wage-Fund
- Wage Rates
- Working Class--Wages
- Optimization
- Temperature Compensation
- Cost Optimal Control
- Fuel Optimal Control
- H<Sup>∞</Sup>Control
- H<Sup>∞</Sup>Optimisation
- Linear Quadratic Control
- Lq Control
- Minimax Techniques
- Maxmin Technique
- Minmax Technique
- Minimisation
- Minimization
- Minimum Principle
- Optimal Control
- Extremum Control
- Optimum Control
- Optimisation
- Maximisation
- Maximization
- Np-Complete Problems
- Np-Hard Problems
- Pareto Optimisation
- Particle Swarm Optimisation
- Performance Index
- Periodic Control
- Periodic Systems
- Payroll
- Singular Optimal Control
- Static Var Compensators
- Statcom
- Static Reactive Power Compensators
- Synchronous Static Compensators
- Suboptimal Control
- Time Optimal Control
- Time-Varying Systems
- Time Varying Parameters
- Reduction (Mathematics)
- Wage Determination
- Optimisation Methods
- Optimization Methods
- Optimization Problem
- Wages And Remuneration
- Compensation (Wages)
- Wages (Compensation)
- 极小化
- 最小值原理
- 最优控制
- 最优化
- 性能指标
- 次优控制
- Time-Optimal Control
- 时间最优控制
- Diagnosis Related Groups†
- Semiconductor Quantum Wells
- Te
- Tellur
- Tellure
- Composes Du Tellure
- Tellurverbindungen
- License
- Unknown
- External links
Abstract
2μm InGaSb/AlGaAsSb strained quantum wells and a tellurium-doped GaSb buffer layer were grown by molecular beam epitaxy(MBE). The growth parameters of strained quantum wells were optimized by AFM, XRD and PL at77 K. The optimal growth temperature of quantum wells is440°C. The PL peak wavelength of quantum wells at300 K is1.98μm, and the FWHM is115 nm. Tellurium-doped GaSb buffer layers were optimized by Hall measurement. The optimal doping concentration is1.127×1018 cm-3 and the resistivity is5.295×10-3Ωcm.?2011 Chinese Institute of Electronics.