Micro nuclear reaction analysis (micro-NRA) exploiting the nuclear reaction D(3He,p)4He was used for post-mortem analyses of special marker samples, exposed to deuterium plasma inside ASDEX Upgrade (AUG) tokamak and to the deuterium plasma jet in the Pilot-PSI linear plasma gun. Lateral concentration profiles of deuterium and erosion/deposition profiles of the marker materials were obtained by a combination of micro-NRA and particle induced X-ray emission by 3He beam (3HIXE). In the case of AUG samples, where 25nm thick W marker layers had been deposited on unpolished and polished graphite substrates, the effect of surface roughness on local erosion and deposition was also investigated. The lateral distribution of W concentration showed that erosion is much more distinct in the case of polished samples and the resulting surface shows a "leopard" skin pattern of W accumulated on carbon aggregates left on the surface from polishing. The Pilot-PSI samples indicated preferential accumulation of deuterium a few mm off from the centre of the region affected by the plasma beam. This is connected with the largest surface modifications while the thick deposited layers at the centre do not favour deuterium retention per se. The results were cross correlated with those obtained using laser-induced breakdown spectroscopy (LIBS). With its quantitative abilities, micro-NRA provided essential calibration data for in situ LIBS operation, as well as for complementary post mortem Secondary Ion Mass Spectroscopy (SIMS).