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The microfabrication of mold for polymer microfluidic devices with Zr-based metallic glass

Authors
  • Zhang, Xiang
  • Li, Haotong
  • Wang, Zhenxing
  • Chen, Xueye
  • Li, Qian
Type
Published Article
Journal
Biomedical Microdevices
Publisher
Springer-Verlag
Publication Date
Nov 06, 2018
Volume
20
Issue
4
Identifiers
DOI: 10.1007/s10544-018-0342-0
Source
Springer Nature
Keywords
License
Yellow

Abstract

Polymer microfluidic devices are used for many purposes such as microarrays and biochips. The key tool for manufacturing these chips in bulk is an appropriate mold. However, the popular material for making molds is nickel or nickel alloys, which have low stiffness and wear out easily. Zr-based metallic glass is a promising material for micro- or nanomolds because it has good mechanical properties and can be easily formed with high precision. In this paper, Zr-based metallic glass is proposed for use as micromold insert to make poly-(methyl methacrylate) (PMMA) microfluidic devices. Our experiments show that they have good feature integrity and replication quality. Microchannels we fabricated using these replicas did not leak and had good flow performance. Zr-based metallic glass can greatly ease the manufacture of plastic microfluidic devices for research and commercial applications.

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