Micro-Masonry of MEMS Sensors and Actuators

Authors

• Zhang, Yong
• Keum, Hohyun
• Park, Kidong
• Rashid Bashir
• Kim, Seok

Type

Published Article

Journal

Journal of Microelectromechanical Systems

Publisher

Institute of Electrical and Electronics Engineers

Publication Date

Mar 30, 2014

Pages

308–314

Source

LIBNA