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A MEMS RESONANT LORENTZ-FORCE MAGNETOMETER WITH BOTH STRUCTURAL TOPOLOGY OPTIMIZATION AND PARAMETRIC PUMPING FOR Q-FACTOR ENHANCEMENT

Authors
  • Song, Xiaoxiao;
  • Gao, Lu;
  • Xi, Jingqian;
  • Wang, Chen;
  • Li, Fangzheng;
  • Xu, Lei;
  • Wang, Yuan; 135470;
  • Liu, Huafeng;
  • Zhao, Chun;
  • Kuang, Shuangyang;
  • Tu, Liang-Cheng;
  • Kraft, Michael; 117649;
Publication Date
Jan 01, 2022
Source
Lirias
Keywords
License
Unknown
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Abstract

status: published

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