Affordable Access

deepdyve-link
Publisher Website

SAW Resonators and Filters Based on Sc0.43Al0.57N on Single Crystal and Polycrystalline Diamond.

Authors
  • Sinusia Lozano, Miguel1, 2
  • Fernández-García, Laura3, 4
  • López-Romero, David5
  • Williams, Oliver A6
  • Iriarte, Gonzalo F3
  • 1 Institute for Optoelectronic Systems and Microtechnology, Universidad Politécnica de Madrid, Avenida Complutense, 30, 28040 Madrid, Spain. , (Spain)
  • 2 Nanophotonics Technology Center, Universitat Politècnica de València, Camino de Vera, s/n Edificio 8F|Planta 2ª, 46022 Valencia, Spain. , (Spain)
  • 3 Departamento Ciencia de Materiales, Escuela Técnica Superior de Ingenieros de Caminos, Canales y Puertos, Universidad Politécnica de Madrid, Ciudad Universitaria, Calle del Profesor Aranguren 3, 28040 Madrid, Spain. , (Spain)
  • 4 Departamento de Sensores y Sistemas de Ultrasonidos, Instituto de Tecnologías Físicas y de la Información Leonardo Torres Quevedo-ITEFI, CSIC, Calle Serrano 144, 28006 Madrid, Spain. , (Spain)
  • 5 Instituto de Micro y Nanotecnología, IMN-CNM, CSIC Isaac Newton, 8, Tres Cantos, 28760 Madrid, Spain. , (Spain)
  • 6 School of Physics and Astronomy, Cardiff University, Cardiff CF24 3AA, UK.
Type
Published Article
Journal
Micromachines
Publisher
MDPI AG
Publication Date
Jun 30, 2022
Volume
13
Issue
7
Identifiers
DOI: 10.3390/mi13071061
PMID: 35888879
Source
Medline
Keywords
Language
English
License
Unknown

Abstract

The massive data transfer rates of nowadays mobile communication technologies demand devices not only with outstanding electric performances but with example stability in a wide range of conditions. Surface acoustic wave (SAW) devices provide a high Q-factor and properties inherent to the employed materials: thermal and chemical stability or low propagation losses. SAW resonators and filters based on Sc0.43Al0.57N synthetized by reactive magnetron sputtering on single crystal and polycrystalline diamond substrates were fabricated and evaluated. Our SAW resonators showed high electromechanical coupling coefficients for Rayleigh and Sezawa modes, propagating at 1.2 GHz and 2.3 GHz, respectively. Finally, SAW filters were fabricated on Sc0.43Al0.57N/diamond heterostructures, with working frequencies above 4.7 GHz and ~200 MHz bandwidths, confirming that these devices are promising candidates in developing 5G technology.

Report this publication

Statistics

Seen <100 times