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Lateral growth rates in laser CVD of microstructures.

Authors
  • Petzoldt, F.
  • Piglmayer, K.
  • Kraeuter, W.
  • Baeuerle, D.
Publication Date
Jan 01, 1984
Source
Fraunhofer-ePrints
Keywords
Language
English
License
Unknown
External links

Abstract

Lateral growth rates of Ni spots deposited on absorbing substrates by decomposition of Ni(CO)4 with visible Kr plus laser light have been measured. The experimental data are consistent with the calculated temperature distributions. The mechanism of decomposition is thermal with an apparent chemical activation energy of 22 plus minus 3 kcal/mole for the temperature range 350 K equal or smaller than T equal or smaller 500 K.

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