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JMEMS Letters On the Dynamic Range and Resolution of Thermal-Piezoresistive Resonant Mass Sensors

Authors
  • Zhang, Hemin; 142801;
  • Quan, Aojie; 128974;
  • Wang, Chen; 135470;
  • Wang, Chenxi; 127803;
  • Wang, Linlin;
  • Kraft, Michael; 117649;
Publication Date
Jan 21, 2022
Source
Lirias
Keywords
License
Unknown
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