Investigation of acoustic waves generated in an elastic solid by a pulsed ion beam and their application in a FIB based scanning ion acoustic microscope

The aim of this work is to investigate the acoustic wave generation by pulsed and periodically modulated ion beams in different solid materials depending on the beam parameters and to demonstrate the possibility to apply an intensity modulated focused ion beam (FIB) for acoustic emission and for nondestructive investigation of the internal structure of materials on a microscopic scale. The combination of a FIB and an ultrasound microscope in one device can provide the opportunity of nondestructive investigation, production and modification of micro- and nanostructures simultaneously. This work consists of the two main experimental parts. In the first part the process of elastic wave generation during the irradiation of metallic samples by a pulsed beam of energetic ions was investigated in an energy range from 1.5 to 10 MeV and pulse durations of 0.5-5 #mu#s, applying ions with different masses, e.g. oxygen, silicon and gold, in charge states from 1"+ to 4"+. The acoustic amplitude dependence on the ion beam parameters like the ion mass and energy, the ion charge state, the beam spot size and the pulse duration were of interest. This work deals with ultrasound transmitted in a solid, i.e. bulk waves, because of their importance for acoustic transmission microscopy and nondestructive inspection of internal structure of a sample. The second part of this work was carried out using the IMSA-100 FIB system operating in an energy range from 30 to 70 keV. The scanning ion acoustic microscope based on this FIB system was developed and tested. (orig.) / SIGLE / Available from TIB Hannover: RR 1847(416) / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische Informationsbibliothek / DE / Germany