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Influence of the initial electrochemical potential on the growth mechanism and properties of anodic oxides on (100) Si

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DOI: 10.1149/1.1837129
OAI: oai:cisti-icist.nrc-cnrc.ca:cistinparc:12339040
Source
NRC Publications Archive
Keywords
  • Annealing
  • Anodised Layers
  • Electric Potential
  • Electrochemical Electrodes
  • Electrolytes
  • Microelectrodes
  • Oxidation
  • Polarisation
  • Silicon
  • Thickness Control
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