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Improved deep-etched multilayer grating reconstruction by considering etching anisotropy and abnormal errors in optical scatterometry.

Authors
Type
Published Article
Journal
Optics Letters
1539-4794
Publisher
The Optical Society
Publication Date
Volume
40
Issue
4
Pages
471–474
Identifiers
DOI: 10.1364/OL.40.000471
PMID: 25680127
Source
Medline

Abstract

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