Implantation of tungsten ions in the frequency-pulsed regime
- Authors
- Publication Date
- Jan 01, 2001
- Source
- OpenGrey Repository
- Keywords
- Language
- English
- License
- Unknown
Abstract
Ion implantation (II) is one of the most promising methods of surface treatment in resources-saving technologies, in particular, in the case of expensive rare metals. The aim of this work was the investigations of the special features of ion implantation of heavy metals, in particular, tungsten, in the frequency-pulsed regime using the modified system of shaping high-voltage pulses in the plasma-arc ion source / Translated from Russian (Fiz. Khim. Obrab. Mater. 1998 (3) p. 21-25) / Available from British Library Document Supply Centre-DSC:9023.190(10093)T / BLDSC - British Library Document Supply Centre / SIGLE / GB / United Kingdom