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Highly selective etch process for silicon-on-insulator nano-devices

Authors
  • Wahlbrink, Thorsten
  • Mollenhauer, Thomas
  • Georgiev, Y. M.
  • Henschel, W.
  • Efavi, J. K.
  • Gottlob, Heinrich Dieter Bernd
  • Lemme, Max C.
  • Kurz, Heinrich
  • Niehusmann, Jan
  • Haring Bolívar, Peter
Publication Date
Jan 01, 2005
Source
Publikationsserver der RWTH Aachen University
Keywords
Language
English
License
White
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