Affordable Access

High-resolution scanning electron microscopy.

Authors
  • Joy, D C
  • Pawley, J B
Type
Published Article
Journal
Ultramicroscopy
Publisher
Elsevier
Publication Date
Nov 01, 1992
Volume
47
Issue
1-3
Pages
80–100
Identifiers
PMID: 1481281
Source
Medline
License
Unknown

Abstract

The spatial resolution of the scanning electron microscope is limited by at least three factors: the diameter of the electron probe, the size and shape of the beam/specimen interaction volume with the solid for the mode of imaging employed and the Poisson statistics of the detected signal. Any practical consideration of the high-resolution performance of the SEM must therefore also involve a knowledge of the contrast available from the signal producing the image and the radiation sensitivity of the specimen. With state-of-the-art electron optics, resolutions of the order of 1 nm are now possible. The optimum conditions for achieving such performance with the minimum radiation damage to the specimen correspond to beam energies in the range 1-3 keV. Progress beyond this level may be restricted by the delocalization of SE production and ultimate limits to electron-optical performance.

Report this publication

Statistics

Seen <100 times