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High Quality factor photonic crystal nanobeam cavities

Authors
Type
Preprint
Publication Date
Submission Date
Identifiers
DOI: 10.1063/1.3107263
Source
arXiv
License
Yellow
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Abstract

We investigate the design, fabrication and experimental characterization of high Quality factor photonic crystal nanobeam cavities in silicon. Using a five-hole tapered 1D photonic crystal mirror and precise control of the cavity length, we designed cavities with theoretical Quality factors as high as 14 million. By detecting the cross-polarized resonantly scattered light from a normally incident laser beam, we measure a Quality factor of nearly 750,000. The effect of cavity size on mode frequency and Quality factor was simulated and then verified experimentally.

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