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High Quality factor photonic crystal nanobeam cavities

Authors
  • Deotare, Parag B.
  • McCutcheon, Murray W.
  • Frank, Ian W.
  • Khan, Mughees
  • Loncar, Marko
Type
Preprint
Publication Date
Feb 05, 2009
Submission Date
Jan 27, 2009
Identifiers
DOI: 10.1063/1.3107263
Source
arXiv
License
Yellow
External links

Abstract

We investigate the design, fabrication and experimental characterization of high Quality factor photonic crystal nanobeam cavities in silicon. Using a five-hole tapered 1D photonic crystal mirror and precise control of the cavity length, we designed cavities with theoretical Quality factors as high as 14 million. By detecting the cross-polarized resonantly scattered light from a normally incident laser beam, we measure a Quality factor of nearly 750,000. The effect of cavity size on mode frequency and Quality factor was simulated and then verified experimentally.

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